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STP-301 Series
Edwards STP-301 Series User Manual
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MT-21E-003-F
STP Series Turbomolecular Pumps
STP-301/451 Series
(Third Edition - f)
Instruction Manual
Copyright 2008 Edwards Japan Limited. A
ll rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Jan. 2008
2
Table of Contents
Default Chapter
2
Safety Precautions
2
Applied Standards
6
Introduction
6
Limited Warranty
8
Table of Contents
9
1 Precautions for Safe Operation of the STP Pump
14
Usable Gases
14
Precautions on Maintenance and Inspection
14
Labels
15
2 Operation Principle of the STP Pump
18
Figure 2.1 Cross Sectional View of the STP Pump
19
3 Unpacking
20
Unpacking the STP Pump and the STP Control Unit
20
Accessories
20
Table 3.1 Accessories
20
Table 3.2 Accessories for Chemical Specific Pump (Type C)
20
4 Installation of the STP Pump
22
Name and Function of each Part
22
Figure 4.1 Configuration of the STP Pump
23
Precautions before Installation
24
Operating Environment
24
Installation Area
25
Bench
25
How to Install the STP Pump
26
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
26
Cleaning the Seal
27
Figure 4.3 STP Pump Installation Positions
28
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
28
STP Pump Installation Positions
28
How to Secure the STP Pump
29
Table 4.1 Tightening Torque of Bolt
29
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
30
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
30
Figure 4.6 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)
31
Table 4.3 Number of Claw Clamps by Size of Flange
31
Figure 4.7 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)
32
Vacuum Piping
33
Connecting the Ground Cable
34
Connecting the Purge Port (for the Chemical Specific Pump, Type C)
35
Figure 4.8 Connecting the Purge Port
35
5 Baking, Cooling the STP Pump and Gas Pumping
36
Baking the STP Pump
36
Attaching a Baking Heater
36
Cooling the STP Pump
37
Water Cooling Method
37
Air Cooling Method
38
Gas Pumping
39
How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]
39
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
40
6 Installation of the STP Control Unit
42
Name and Function of each Part
42
Front Panel
42
Figure 6.1 STP Control Unit Front Panel
43
Rear Panel
44
Figure 6.2 STP Control Unit Rear Panel
45
Top Panel
46
Figure 6.3 STP Control Unit Top Panel
46
Side Panel (Left)
47
Figure 6.4 STP Control Unit Side Panel (Left)
47
Operating Environment
48
Insulation Test
48
Precautions before Installation
48
Installation Area
49
Figure 6.5 Peripheral Spaces of the STP Control Unit
49
Attaching the STP Control Unit Front Panel to a Rack
50
Figure 6.6 Example of Securing the STP Control Unit
50
Cable Connection
51
Name and Dimensions of each Cable
51
Figure 6.7 External Dimensions of Ground Cable
51
Figure 6.8 External Dimensions of STP Connection Cable
51
Figure 6.9 External Dimensions of STP Connection Cable
52
How to Connect the Cables
53
Table 6.1 Connecting the Power Cable
54
Figure 6.10 Connecting Method of the AC Power Cable
54
Figure 6.11 How to Secure the Power Cable
55
Connecting to Semiconductor Equipment
56
Connecting to Power
56
Emergency off Circuit (EMO Circuit)
56
7 How to Start/Stop the STP Pump
58
Before Starting
58
Start Procedures
59
Stop Procedures
59
Manual Operation
60
Powering on
60
Starting the STP Pump
60
Stopping the STP Pump
60
Starting the STP Pump after Stopping
61
Powering off
61
Starting the STP Pump after a Safety Function Operates
61
Remote Operation (I/O TB2)
62
Powering on
62
Starting/Stopping the STP Pump
62
Starting the STP Pump after Stopping
62
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (I/O TB2)
62
Powering off
63
Starting the STP Pump after a Safety Function Operates
63
Table 7.2 Reset Operation During Remote Operation (I/O TB2)
63
Remote Operation (CON4: Optional Accessory)
64
Powering on
64
Starting/Stopping the STP Pump
64
Starting the STP Pump after Stopping
64
Table 7.3 Starting/Stopping the STP Pump During Remote Operation (CON4)
64
Powering off
65
Starting the STP Pump after a Safety Function Operates
65
Table 7.4 Reset Operation During Remote Operation (CON4)
65
Figure 7.1 STP Pump Operation Procedures
66
8 Remote Input/Output Signal Terminal Blocks
68
I/O TB1 Terminal Block
68
Table 8.1 I/O TB1 Terminal Block
68
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block
70
Table 8.2 Rated Contacts for Relays CR1, 3, 5, 7, and 8
71
I/O TB2 Terminal Block
72
Table 8.4 I/O TB2 Terminal Block
72
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block
73
CON4 Connector (Optional Accessory)
74
Remote Input Signals
74
Table 8.5 CON4 Connector (Remote Input Signal)
74
Figure 8.3 CON4 Remote Input Signal Connector
75
Table 8.6 Rated Coils for Relays CR1, 2 and 3
75
Remote Output Signals
76
Table 8.7 con 4 Connector (Remote Output Signal)
76
Figure 8.4 CON4 Remote Output Signal Connector
77
Remote Cables (Optional Accessories)
78
Table 8.9 Remote Cable Connections (Single-Side Connector Type)
78
9 Adjustment Method
80
Tuning
80
Tuning Method
80
Figure 9.1 Tuning Procedures
81
Setting the Rated Speed
82
When Setting DSW-B No. 1 to on under Power-ON State
82
When Setting DSW-B No. 1 to on before Powering on
83
Figure 9.2 LCD Message in Rated Speed Setting Mode
84
10 Safety Functions
86
Power Failure
86
Table 10.1 States of Lamps and REMOTE Output Signals at Power Failure
87
Table 10.2 Operations of the STP Pump after Power Recovery
87
Abnormal State of Magnetic Bearing
88
Excessive Vibration
88
Motor Driver Overload
88
Overheating Inside the STP Pump
88
Overheating Inside the STP Control Unit
88
Overspeed
88
Table 10.3 Safety Functions
89
11 Troubleshooting, Maintenance and Inspection
92
Troubleshooting Immediately after an Abnormality/Error Occurs
92
In Case of a Power Failure
92
In Other Cases
92
When Error Message Is Displayed
93
Error Messages
93
Table 11.1 Error Messages
94
Displaying Past Abnormalities/Errors and Accumulated Running-Time
96
Abnormalities When Powering on
98
Abnormalities When Performing the STP Pump Start Operation
98
Table 11.2 Troubleshooting after Powering on
98
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
98
Other Abnormalities
99
Table 11.4 Troubleshooting While the STP Pump Is Rotating
99
Maintenance and Inspection
100
Inspecting the Air Cooling Fan
100
Replacing the Fuses
101
Table 11.5 Recommended Spare Parts
101
Cleaning and Decontamination
102
Inspecting for Deposit
102
Table 11.6 Cleaning and Decontamination
102
Overhaul
103
Transporting for Repair or Overhaul
104
12 Storage and Disposal
106
Storage of the STP Pump
106
Storage of the STP Control Unit
106
Disposal
107
13 Specifications and Accessories
108
Specifications of the STP Pump
108
Table 13.1 Specifications of the STP Pump
108
Figure 13.1 External Appearance of the STP Pump [Without Anti-Corrosion Treatment]
109
Figure 13.2 External Appearance of the STP Pump [Chemical Specific Type C]
110
Figure 13.3 Label Affixing Position for the STP Pump
111
Specifications of the STP Control Unit
112
Table 13.2 Specifications of the STP Control Unit
112
Figure 13.4 External Appearance of the the STP Control Unit
114
Figure 13.5 Label Affixing Positions for the STP Control Unit
115
Unit Conversion Table
116
4
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Edwards STP-301 Series Specifications
General
Brand
Edwards
Model
STP-301 Series
Category
Water Pump
Language
English
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