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Edwards STP Series User Manual
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MT-79E-001-D
STP
Series
Turb
omolecular
Pum
ps
STP-iXR1606
(Issue
1-d)
Instruction
Manual
Copyright
2014
Edw
ards
Japan
Limited.
All
righ
ts
reserved.
Printed
in
Japan.
Read
through
the
S
afety
Precautions
and
each
section
of
this
M
anual
carefully
b
efore
using
the
STP
pum
p.
Keep
this
Manual
i
n
a
place
where
y
ou
can
quickly
access
it
at
any
time.
July
2014
Original
Instruction
s
2
Table of Contents
Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
Warranty Period
13
Item Warranted
13
Disclaimer
14
Spare Parts
14
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance and Inspection Precautions
16
Labels
16
STP Pump Installation Warning Label
16
Hot Surface Warning Label
16
Heavy Product Caution Label
17
High Voltage Device Caution Label
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
21
STP Pump Specifications
21
Maximum Gas Flow-Rate
22
Water Cooling Use Condition
23
Control Unit
24
External Appearance of the STP Pump
26
External Appearance of STP-Ixr1606
26
Label Affixing Positions
27
Installation of the Stp Pump
29
Precautions before Installation
29
Operating Environment
29
Installation Area
31
Space Around the STP Pump
31
Bench
32
Insulation Test
32
Unpacking and Installation
33
Example of Lifting the STP Pump
33
Eyebolt Size
33
Example of Lifting the STP Pump (Horizontal Positioning)
34
STP Pump with Eyebolts
36
Name and Function of each Part
37
Name and Function of the Pump
37
Configuration of the STP Pump
37
Control Unit (Front Panel)
37
Pump Functions
37
Name and Function of the Control Unit
38
Control Unit Front Panel Functions
39
Control Unit Front Panel Functions (Continued)
40
How to Install the STP Pump
41
Installation of the STP Pump to the Vacuum Equipment
41
Cleaning the Seal
42
STP Pump Installation Positions
43
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
43
Secure the STP Pump
44
Tightening Torque of Bolt
44
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
45
Legs for Securing the Base
48
Screw Holes for Securing the Base
48
Power Cable
49
How to Connect the Power Cable
51
Precautions of Vacuum Piping
53
Vacuum Piping Method
54
(For the STP Pump Equipped with Purge Port)
54
Height of Purge Port
54
Connecting the Water Cooling Pipe
55
Positions of the Cooling Water Port
55
Attaching a Baking Heater
56
Connecting to Semiconductor Equipment
57
Connecting to Power
57
Emergency off Circuit (EMO Circuit)
57
Operation
59
Gas Pumping, Cooling and Baking the STP Pump
59
Gas Pumping
59
How to Introduce a Purge Gas
60
Cooling the STP Pump
60
Water-Cooling Method
60
Baking the STP Pump
61
Before Starting the STP Pump
62
Confirmation before Starting
62
Confirmation of Vacuum System
62
Powering on
63
Pump Operation
63
Input Operation Port Setting
63
Starting/Stopping the STP Pump
64
Pump Operation Method
64
Starting/Stopping the STP Pump (X2 REMOTE)
64
How to Start/Stop the STP Pump
65
Starting the STP Pump after Stopping
65
Starting the STP Pump after a Safety Function Operates
65
Powering off
65
Reset Operation (X2 REMOTE)
65
Led
66
Parallel Port Input/Output Signal
67
Input Signal Pins
67
X2 REMOTE Connector
67
X2 REMOTE Input Signal Pins
68
X2 REMOTE Input Signal Pins (Continued)
69
X2 REMOTE Input Signal Pins (Contact Input)
70
Input Operation Port Setting
71
Rotation INHIBIT Signal
72
Rotation INHIBIT Signal Input
72
Second Speed Option
73
Second Speed Function
73
Output Signal Pins
74
X2 REMOTE Output Signal Pins
75
X2 REMOTE Output Signal Pins
76
X2 REMOTE Output Signal Pins (Continued)
76
Serial Communication Protocol
79
Introduction
79
Connection and Setting up
80
Signal Connection
80
Connecting the RS485
82
Communication Parameter Setting
83
Communication Parameters
83
Input Operation Port Setting
84
Serial Port
84
Input Operation Port
84
Serial Communication Timeout Setting
85
Serial Communication Time out Setting
85
Recommended Items about Communication Cable Installation
86
Grounding Example (both Ends Grounding)
86
Grounding Example (Single Point Grounding)
86
Protocol Specifications
89
General Description
89
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
90
(In the RS232/RS485 Single Point Connection)
91
Query Command
92
(In the RS232/RS485 Single Point Connection)
92
Transmission Data Format
93
Frame Control (Checksum)
94
Error Control
94
Transmission Frame in the RS485 Multi-Point Connection
94
Control Command in the RS485 Multi-Point Connection
96
5.3.10 Query Command in the RS485 Multi-Point Connection
97
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection
98
Pump Operation Commands
98
5.3.12 Application Note
99
Example of Answer Resending Process
100
Example of Command Sending During Answer Data Reply
100
Command Specifications
103
Command List
103
Readmeas
104
Command
104
Readfailmess
105
Pump Operation Commands
105
Error Message Values
107
Error Message Values (Continued)
108
Readmodfonct
109
Pump Operation Mode
110
Readversion
111
Readcounters
112
Readsetpoint
113
Readmotortemp
113
5.4.10 Readstatus
114
5.4.11 Readevents
115
Remote Mode
115
5.4.12 Setspeedsetpoint
116
5.4.13 Readspeedsetpoint
117
5.4.14 Readmodfonctwithwarning
118
5.4.15 Readmeasvalue
121
5.4.16 Readoptionfunc
123
5.4.17 Setoptionfunc
126
5.4.18 Readcondition
128
5.4.19 Readeventswithtime
130
5.4.20 Setoptions
134
Second Speed Option Setting
134
Option Function Number and Parameter List
134
5.4.20.2 Second Speed Selection
135
5.4.21 Readoptions
136
5.4.21.1 Second Speed Function Setting
136
5.4.21.2 Second Speed Select
137
Stp-Link and Display Unit
139
STP-Link
139
Display Unit
140
Safety Functions
141
Power Failure
141
Operation after a Power Recovery
142
States of Leds and X2 REMOTE Output Signals at Power Failure
142
Abnormal State of Magnetic Bearing (Disturbance)
143
Excessive Vibration (Disturbance)
143
Motor Driver Overload (DRV Overload)
143
Overheating Inside the STP Pump (MOTOR Overheat)
143
Overheating Inside the Control Unit (CNT Overheat)
143
Overspeed
144
WARNING" Function
144
WARNING Function
144
Contents of WARNING Function
146
First Damage Limit
146
Second Damage Limit
146
Pump Run Time over
146
Pump Overload
147
Imbalance
147
WARNING Function Setting
148
Default Setting of WARNING Function
148
Factory Setting and Variable Range
148
Troubleshooting Immediately after Failure Occurs
149
After Power Failure
149
After Other Abnormality/Error
149
Troubleshooting
150
Indication of "FAILURE" LED (Red)
150
Indication of "FAILURE" LED (Green)
157
No Indication of the "FAILURE" LED
157
Maintenance and Inspection
159
Cleaning
160
Inspecting the Deposit
160
Maintenance
161
Recommended Overhaul Intervals
161
Standard Replacement Parts
161
Recommended Maintenance Intervals for Main Parts
162
Transporting for Repair or Overhaul
163
Storage and Disposal
165
Storage of the STP Pump
165
Disposal
166
Service, Spares and Accessories
167
Introduction
167
Service
167
Spares
167
Accessories
168
4
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Edwards STP Series Specifications
General
Brand
Edwards
Model
STP Series
Category
Water Pump
Language
English
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