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COMBIVAC CM 31
LEYBOLD COMBIVAC CM 31 User Manual
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COMBIV
A
C CM 31
Cat.
No
.
157 89, 896 89, 897 89
Operating Instructions
V
acuum Pumps
Instrumentation
Fittings and V
alves
LEYBOLD
V
ACUUM
GA 09.504 / 5.02
2
Table of Contents
Table of Contents
2
Description
4
General
4
Purpose
4
Technical Data
4
General Data
4
TM Measurement Channels
4
PM Measurement Channel
5
Relay Outputs
5
Chart Recorder Outputs
5
AC Power Requirements
5
High Voltage Control Input (Only for PENNINGVAC)
5
Mechanical Data
6
Ambient Conditions
6
Technical Description
6
Combivac CM 31
6
THERMOVAC Method of Measurement (Pirani)
6
PENNINGVAC Method of Measurement (Cold Cathode)
6
RS 232 C Interface
7
Equipment
7
Supplied Equipment
7
Accessories
7
Operation
8
Start-Up
8
Electrical Connection
8
Changing the Line Voltage Setting and Exchanging the Fuses
9
Controls and Their Functions
9
Bar Graph Display
9
Digital Display
10
Measurement Units
10
Status Display Area
10
Keys TM 1, TM 2 and PM
11
Key HV
11
Key Decrement
12
Key Increment
12
Key para
12
Checking and Setting up of the Equipment Parameters
12
Locking of Parameter Settings
15
Supply and Socket Connections on the Rear
16
AC Power Supply
16
Connection of the THERMOVAC Gauge
16
Connection of the PENNINGVAC Gauge
16
Screw Terminal Outputs for the THERMOVAC Channels
16
Screw Terminal Outputs for the PENNINGVAC Channel
17
RS 232 C Interface
17
Installing the Instrument
18
Installation
18
Rack Installation
18
Panel Installation
18
Using the CM 31 as a Table-Top Instrument
18
Checking the Equipment Functions
18
The THERMOVAC Channels
18
The PENNINGVAC Channel
19
Alignment of the THERMOVAC Gauge Heads
19
Switching off
19
Status Messages
20
Chart Recorder Output Tables
21
Chart Recorder Output Tables for TM Measurement Channels
21
PM Measurement Channel
23
RS 232 C Interface
25
Description
25
Interface Parameters
25
Baud Rate
25
Data Format
25
End and Acknowledgement Character for Remote Operation
25
Output Rate and End Character for Printer Output
25
Initial Operation
25
Remote Control Operation
25
Cable Link
25
Baud Rate and Data Format
26
End Character
26
Acknowledgement Character
26
Reset Character
27
Printer Operation
27
Output of Measurement Data
27
To a Printer
27
RS 232 C Baud Rate and Data Format for Printer Output
27
Output Rate for Printer Output
27
End Character
27
Data Output and Data Formats
27
Measurement Data Output
27
Remote Control Operation
27
Parameter Output and Response Time
28
Interface Commands and Data Input for A-Series Instruments with RS 232 C Interface
28
Formation of Measurement Data and Readout Commands
28
Trigger Adjustment Commands
29
Operating Parameters
29
Output of Error Messages
29
Interface Errors (ERI)
29
Program Examples for Setting the Parameters
30
Examples for the Cable Link between the Interface and an IBM ® -PC
34
Maintenance
35
Service at Leybold's
35
Brief Operating Instructions
36
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LEYBOLD COMBIVAC CM 31 Specifications
General
Brand
LEYBOLD
Model
COMBIVAC CM 31
Category
Measuring Instruments
Language
English
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