pg. 1, Revision 6/2017
Dektak XT 2D Profilometer Operation Manual
The Dektak XT is a 2D contact profilometer used for step height, pitch and surface roughness
measurements. Vision 64 application software controls the system data collection and analysis.
Specifications
• Stylus Contact Profilometry
• Two-dimensional surface profile measurements
• Stylus Force 1 to 15mg
• 12.5um diameter tip
• Sample X/Y Stage Manual 100mm (4 in.) X/Y, manual leveling
• Software Vision 64 Operation and Analysis Software
• Scan Length Range 55mm (2in.)
• Data Points Per Scan 120,000 maximum
• Max. Sample Thickness 50mm (1.95in.)
• Max. Wafer Size 200mm (8in.)
• Step Height Repeatability <5Å, 1sigma on 0.1μm step
• Vertical Range 1mm (0.039in.)
• Vertical Resolution 1Å max. (@ 6.55_m range
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