CKD WKF2 Series User Manual

USER-FRIENDLY
Easier to use
Cooling and temperature control of semiconductor
manufacturing equipment. Etching, grinder, dicer, CVD.
Quantitative management of
cooling water.
Semiconductor Semiconductor manufacturing equipment Hardening Induction hardening device
Control equipment
Communication
I/O
Unit
A/D conversion
unit
PLC
I/O Unit
Input
terminal
Output
terminal
Recorder
Monitor (displaying
ow rate)
Water
Air
WFK2
 SERIES
Karman vortex ow rate sensor for water FLUEREX
Detecting abnormalities
Controlling peripheral
devices
Model variations Port size
0 5 10 20 50 100 250
Flow rate range (L/min)
Option
50.4
1.6
4
8
20 250
100
50
20
Rc3/8
Rc1/2
Rc3/4
Rc1
Rc1 1/4
Rc1 1/2
Manual valve
integration
for easy
flow rate
adjustments
WFK2-005
WFK2-020
WFK2-050
WFK2-100
WFK2-250
Easy to read 2-screen color liquid crystal display
Set values, temperature, etc., can be displayed
simultaneously.
Display screen rotation
The liquid crystal display can be rotated in 90° increments with-
out moving the body. There is no interference even when
installed parallel.
Example of applications
Contact CKD for support for food manufacturing processes FP Series.
Flow rate measurement data
Water temperature measurement data
Detecting abnormal ow rate
Controlling solenoid valve
Air operated
valve
Solenoid valve

CKD WKF2 Series Specifications

General

Brand	CKD
Model	WKF2 Series
Category	Accessories
Language	English