Inficon Gemini MPG504 User Manual

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2.2 Gas Type Dependence MAG5xx
Indicated pressure (gauge calibrated for air)
4
2
10
–3
8
6
4
2
10
–4
8
6
4
2
10
–5
8
6
4
2
10
–6
8
6
4
2
10
–7
10
–7
2 4 6
10
–6
2 4 6
10
–5
2 4 6
10
–4
2 4 6
10
–3
2 4 6
10
–2
Xe Kr
Air
O
2
CO
N
2
H
2
Ne
He
p
eff
[mbar]
p [mbar]
Ar
Indication range below 10
-5
mbar
In the range below 10
-5
the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:
p
eff
= K × indicated pressure

Inficon Gemini MPG504 Specifications

General

Accuracy (Capacitive)	±0.25% of reading
Protection Class	IP40
Measurement Principle	Pirani, Capacitive
Measurement Range (Pressure)	1E-4 Torr to 1000 Torr
Response Time	<1 second
Operating Temperature	0°C to 50°C
Storage Temperature	-20°C to 70°C
Power Supply	+24 VDC ±10%
Communication Protocol	RS-485