DSX1000
If you tighten the clamping knob too firmly, the stage floats up and the level cannot be secured. Tighten the
clamping knob appropriately.
Detaching the manual stage (U-SIC4R2)
To detach the manual stage, perform the procedure described above in reverse order.
Attaching the stage plate (U-MSSP4)
Detach the folding prevention pins (2 pcs.) placed at the bottom of the stage plate U-MSSP4.
Place the stage plate on the stage, and tighten the clamping screws (2 pcs.).
To detach the stage plate, perform the procedure described above in reverse order.
Attaching the wafer holder (BH2-WHR43, U-WHP2)
Place the wafer holder plate U-WHP2 on the stage and tighten the clamping screws (2 positions).
Attach the rotatable wafer holder BH2-WHR43.
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8. Assembly
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