MAINTENANCE
270727EI.DOCX 17200295_002_C0/2016 - © Leybold 27/40
6.1.1 Dismount actuator / plate assembly
The item numbers in brackets refer to «Figure 6-1».
1. Loosen and remove screws (60) uniformly and in crosswise order.
2. Withdraw actuator / plate assembly carefully from body.
3. Remove bonnet seal (62) from groove by using an O-ring removal tool.
6.1.2 Replacement of plate seal
1. Remove plate seal (61) from groove by using an O-ring removal tool.
2. Check sealing surface and clean it with a cleanroom wiper soaked with alcohol (2%
methyl ethyl ketone).
3. Put new plate seal (61) on groove and press it into groove at 4 opposite spots.
4. Press remaining sections uniformly into groove.
6.1.3 Mount actuator / plate assembly
1. Check sealing surfaces of bonnet flange / valve seat and clean it with a cleanroom
wiper.
2. Put bonnet seal (62) into body.
3. Insert actuator / plate assembly carefully.
4. Fasten screws (60) uniformly and in crosswise order in 2 to 3 rounds.
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