The µF
TM
, Micro Flow and µF sensor are a trademark of Azbil Corporation in
Japan.
NOTICE
© 2008-2012 Azbil Corporation All Rights Reserved.
Be sure that the user receives this manual before the product is used.
Copying or duplicating this user’s manual in part or in whole is forbid-
den. The information and specifications in this manual are subject to
change without notice.
Considerable effort has been made to ensure that this manual is free
from inaccuracies and omissions. If you should find an error or omis-
sion, please contact the azbil Group.
In no event is Azbil Corporation liable to anyone for any indirect, special
or consequential damages as a result of using this product.
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