3.
Chapter 2: Introduction
2.1. Brief Statement
Delta “HPP-1K5A01KAT” is a high voltage pulsed DC generator that meets the exciting
requirement in physical vapor deposition technique with a wide range of applications in the
semiconductor, optical and industrial coating, particularly for Reactive Sputtering, like Alumina,
Titania and Silica with high deposition rates.
The reverse voltage here is adjustable from 50V to 100V, which is dependent from the applied
negative voltage and could be adjustable for different targets. Maximum 1.9KV adjustable ignition
voltage could help users to ignite plasma successfully every time for some specific targets, for
example, copper target.
Asymmetric pulsing output makes the arc happening reduced dramatically. With High-speed
MCU based arc detection, Delta power could achieve 1 micro-sec arc detection time. As soon as
the arc is detected, the output will be reversed to positive to reduce arc energy approximately 5
microseconds. When the micro ARC is cleared, normal pulsing resumes.
With Delta’s mutual power supply design technology, efficiency at rated load is higher than
competing products. High efficiency, less temperature stress and highly integrated circuit make it
more stable, reliable and longer product lifetime. DSP-based digital control provides user an
accurate, repeatable and quick pulsed output response. Active front panel, multiple serial and analog
interfaces facilitate user to get an easy and flexible control over power supply.
Figure 2.1 Delta “HPP-1K5A01KAT” Sputtering Power Supply
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