PARTS LIST
6-4 CommandTHC for X-Y Table Instruction Manual
11
Plasma interface assembly
Index no. Part no. Description Quantity
1 128494 Plasma interface assembly 1
2 128408 PC Board Assembly, plasma interface 1
3 041842 HPR PC Board Assembly, plasma interface 1
Figure 6-3 Plasma interface assembly
HT4400 and HPR installation
Note: Instructions to install the plasma interface PCB into the HT4400 power supply are included in
section 3h.
Instructions to install the plasma interface PCB into the HPR power supply are included in
section 3i.
The plasma interface enclosure is not used for the HT4400.
1
2
3