Keithley S530 Diagnostic Manual

S530 Diagnostic Manual Section 1: Introduction to S530 Diagnostics
NOTE
In order to fully test a system, you must perform all of the tests and subtests on the instruments,
however, the UploadToFTP is not necessary.
Components not connected
The S530 diagnostics require that all DUT (device under test) pins are open and components are not
connected. If you are using a wafer prober, lower the chuck (or raise the probe needles). Ensure that
either a blank probe card or a probe card with needles, but free of extra components, is installed in
your probe card adaptor. Also, make sure that the vacuum is applied for the probe card to ensure a
proper connection.
Run diagnostics
Click the Run icon on the ACS toolbar and the selected diagnostic test will start and a progress dialog
box will display. Interim results will display in the ACS log window, and the progress dialog box will
display a pass or failure summary along with the test progress bar (see next Figure).
Figure 6: Run diagnostics progress
Progress status
A progress status dialog box will display, including failed items of the current diagnostic test.
The MATRIX DIAGNOSTIC STATUS text in the dialog box is green if it passes, and red if it fails
(see the next two Figures).
S530-906-01 Rev. A / March 2011 1-7

Keithley S530 Specifications

General

Brand	Keithley
Model	S530
Category	Test Equipment
Language	English