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Keithley S530 Diagnostic Manual

Keithley S530
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Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual
Figure 56: Model 7072 HV card, rows C, D, and E
2. If rows A and B or E and F are under test, then row C will be used with pin 2 to connect the force
and sense to GNDU (see next Figure).
Figure 57: Model 7072 HV card, rows A, B, C, or E and F
Kelvin leakage test
The purpose of the leakage test is to check different paths of the matrix. The test consists of force
and sense connections using pin and SMU tests. The pin test determines the relays and paths that
connect to the device under test (DUT) pins, while the SMU test determines the relays that connect to
the SMUs.
The pin test uses SMU1 and SMU2 using Series 2600A instruments. Each pair of adjacent pins will
be tested with pairs of rows. Each pair of rows consists of row n and row n+1 (where n = 1, 3, 5*). The
last pin is connected and tested with the first pin and continues in that order to make sure that all pins
are tested. After connecting each set of pins and rows, execute the test by forcing 60V from the first
SMU and forcing 0V from the second. The current is measured several times for a period of a few
seconds using the second SMU. If the measured current is higher than 1µA, Fail will display in the
ACS GUI test log and in the diagnostic report in the following default directory:
C:\ACS\Projects\Diagnostic\Reports
NOTE
The pair of rows will be tested in reverse order once to test the paths opposite direction. For example,
the row A and B test path will change to row B and A.
3-16 S530-906-01 Rev. A / March 2011

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Keithley S530 Specifications

General IconGeneral
BrandKeithley
ModelS530
CategoryTest Equipment
LanguageEnglish

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