Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual
Figure 39: Test flow chart
NOTE
For the Model 2410 SMU in S530 High Voltage systems, the 1000V range will be tested using
voltages less than 200V since 2600A-series SMUs are used as the test support SMUs. The Model
2410 is tested in a manner similar to that used for the 2600A-series SMUs.
SMU test flow
To confirm both force and sense terminals are working, the Kelvin SMU diagnostic is performed in
two parts: force and sense tests. The test flow is similar to the non-Kelvin SMU test flow.
Short the Hi terminals of these two SMUs using the switch matrix (all Lo terminals of the SMUs
should already be connected using the S530 system Lo Patch Panel.)
To perform the voltage test, diagnostics forces 0A from the test support SMU first, and then
forces voltage from the SMU under test.
To perform the current test, diagnostics forces 0V from the support SMU first, and then forces
current from the SMU under test.
The voltage or current is measured by both SMUs and compared to the diagnostic limits.
For each range, four voltage values are forced: ±0.1 × full range value and ±0.9 × full range value
(except in the case of the Model 2410 SMU). Both SMUs measure these four readings using a
fixed measurement range (current test range) for source and measurement. The results are
compared to the nominal values. If one of the measured values is beyond the limits as defined in
the diagSpec.py file, the result of this range for the SMU will indicate a Fail.
SMU connections
Force test
During the force test, the SMUs are used in two-wire (2W) mode. Therefore, the force terminals are
used during this part of the test. Appropriate relays are closed on the force matrix cards (see next
Figure). The test flow is same as the instrument card 2W tests.
3-4 S530-906-01 Rev. A / March 2011
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