3 Basic Operation
3.2
3.
6 FPD-2010
3.2Gas used
To maintain the performance of the equipment, the gases used shoud meet the following purity standard:
■ Carrier gas (supply pressure: 300 to 980 kPa)
Helium (optimal)Purity 99.999% or higher
Nitrogen (applicable)Purity 99.999% or higher
■ Hydrogen (supply pressure: 300 to 500 kPa)
Hydrogen gas: Purity 99.999% or higher
■ Air (supply pressure: 300 to 500 kPa)
Dry air (cylinder)
NOTE An oil-less compressor (it shoud be dehumidified) can be used. However, use of an air cylinder is recom-
mended to minimize fluctuation in the air flow rate.
Furthermore, sulfur components such as SO2 contained in the air may be detected as impurities when an oil-
less compressor is used. Care should be exercised.
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