© Edwards Limited 2013. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B722-40-880 Issue F
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards DX Compound
Turbomolecular Pumps. The pumps must be used as specified in this manual. Read this manual before installing and
operating the pumps.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The units used throughout this manual conform to the SI international system of units of measurement. When flow
rates are specified, the abbreviation ‘sccm’ is used to mean standard cubic centimetres per minute. This is a flow of
1 cm
3
min
-1
at an ambient temperature of 0 ºC and a pressure of 1013 mbar (1.013 x 10
5
Pa).
The following warning labels are on the pump:
The units used throughout this manual conform to the SI international system of units of measurement; where
appropriate US equivalent units of measurement are also given.
1.2 General description
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
Protective conductor terminal.
Improper use of the equipment could cause damage to it or injury to people. The user is
responsible for the safe operation, installation and monitoring of the system.
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