HEC-OM-O018-A
Table of Contents
TOC-1
Table of Contents
Chapter 1 Safety Instructions ............................................................... 1-1
1.1 Dangers, Warnings, and Cautions Used in This Manual .......................................1-1
1.1.1 Hazard Levels ..................................................................................................................... 1-1
1.1.2 Definitions of “Serious injury” and “Minor injury” ................................................................. 1-2
1.1.3 Symbols............................................................................................................................... 1-2
1.2 Hazard Warning Labels.............................................................................................1-4
1.2.1 Content of label ................................................................................................................... 1-4
1.2.2 Location of hazard warning label ........................................................................................ 1-5
1.3 Location of Model Label ...........................................................................................1-5
1.4 Safety Measures ........................................................................................................1-6
1.4.1 Precautions ......................................................................................................................... 1-6
1.4.2 Protective Equipment .......................................................................................................... 1-7
1.4.3 Long-term Storage...............................................................................................................1-7
1.4.4 Disposing of Product ........................................................................................................... 1-7
1.5 Safety Interlocks........................................................................................................1-8
Chapter 2 Description and Function of Each Part .............................. 2-1
Chapter 3 Transporting and Installation .............................................. 3-1
3.1 Transporting ..............................................................................................................3-1
3.2 Installation..................................................................................................................3-2
3.2.1 Installation Conditions .........................................................................................................3-2
3.2.2 Installation in Clean Room .................................................................................................. 3-3
3.2.3 Pollution Degree.................................................................................................................. 3-4
3.2.4 Installation of Brackets ........................................................................................................3-4
3.3 Wiring .........................................................................................................................3-5
3.3.1 Power Sourse Specification ................................................................................................ 3-5
3.3.2 Power Supply Cable and Connector................................................................................... 3-5
3.3.3 Connector for External Equipment ...................................................................................... 3-6
3.3.4 Procedures for wiring instllation .......................................................................................... 3-7
3.4 Installation of Facility Water Piping .........................................................................3-8
Chapter 4 System Set-up....................................................................... 4-1
4.1 Pre-check ...................................................................................................................4-1
4.2 Facility Water .............................................................................................................4-1
4.2.1 Reference of water quality .................................................................................................. 4-1
4.2.2 Facility water run through.................................................................................................... 4-2
4.3 Filling Bath liquid ......................................................................................................4-2
4.3.1 Preparation of Bath Liquid................................................................................................... 4-2
4.3.2 Filling Bath Liquid ................................................................................................................ 4-4
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