Capacitance-Voltage Unit (CVU)
The 4210-CVU and 4215-CVU Multi-Frequency Capacitance-Voltage Units are impedance
measurement modules that can be installed in the 4200A-SCS.
Capacitance-voltage (C-V) measurements are often used to characterize the gate oxide thickness,
oxide defect density, and doping profile of MOSFETs. In these measurements, as the gate voltage
varies, the capacitance of the gate to the drain and source changes. Capacitance measurements are
typically made using an ac technique. The CVUs measure ac impedance by applying a dc bias
voltage and sourcing an ac voltage across the device under test (DUT) and then measuring the
resultant ac current and phase angle.
The 4210-CVU operates from 1 kHz to 10 MHz. The ac test signal (10 mV
RMS
to 100 mV
RMS
) can be
dc voltage biased from −30 V to +30 V.
The 4215-CVU operates from 1 kHz to 10 MHz at 1 kHz resolution. The ac test signal (10 mV to
1 V
RMS
) can be dc voltage biased from −30 V to +30 V.
Pulse source-measure hardware
The 4220-PGU High Voltage Pulse Generator Unit and 4225-PMU Ultra-Fast Pulse Measure Unit are
high-speed pulse-generator cards for the 4200A-SCS. The 4220-PGU provides pulse output only.
The 4225-PMU provides both pulse output and pulse measurement. The PGU and PMU have similar
pulse output characteristics.
The 4225-PMU can be paired one or two 4225-RPM Remote Preamplifier/Switch Modules. When the
RPM is used as a preamplifier for the PMU, it provides additional low-current measurement ranges.
When the RPM is used as a switch, it switches between the PMU, SMUs, and CVUs.
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