DESIGN AND FUNCTION Series
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Edition 2018-08-20 605262EE
3 Design and Function
3.1 Design
1 Integrated controller 4 Double seal
2 Coupling 5 Plate
3 Bearing 6 Valve body
3.2 Function
The valve plate (5) acts as a throttling element and varies the conductance of the valve opening.
The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.
See also principle drawing on chapter: «Connection Overview».
Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures
very fast and accurate process pressure control even in demanding contaminating processes.
Double seal of
rotary feedthrough