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VAT 612 Series User Manual
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Series 612
INSTALLATION
605262EE
E
dition 2018-08
-20
17/
116
4.2.
1
Install
ation space condi
tion
Install the valve with integrated contro
ller wi
th space f
or dism
antling and a
ir
circulation as sho
wn in
figure below.
Sample picture
4.2.
2
Connecti
on overview
System:
1
Valve with controller and actuator
2
Process chamber
3
Gas inlet
4
Pressure sensor(s
)
5
Sensor cable
6
Cable to remote control unit
7
Cable to power supply
8
HV Pump
70 mm
M
3
4
5
6
7
2
1
8
16
18
Table of Contents
Table of Contents
3
Description of Product
6
Identification of Product
6
Use of Product
6
Used Abbreviations
6
Related Documents
6
Important Information
6
Technical Data
7
Control and Actuating Unit
7
Valve Unit
9
Safety
10
Compulsory Reading Material
10
Danger Levels
10
Personnel Qualifications
11
Safety Labels
11
Design and Function
12
Design
12
Function
12
Pressure Control System Overview and Function
13
Principle of a Pressure Control System
14
Installation
15
Unpacking
15
Installation into the System
16
Installation Space Condition
17
Connection Overview
17
Installation Procedure
18
Tightening Torque
19
Mounting with Centering Rings
19
Mounting with O-Ring in Grooves
20
Admissible Forces
20
Admissible Forces at Controller
22
Requirements to Sensor Connection
23
Electrical Connection
23
Ground Connection
24
Sensor Supply Concepts
25
Power and Sensor Connection (+24 VDC Sensors)
26
Power and Sensor Connection (±15 VDC Sensors) Without Opt. SPS Module
28
Power and Sensor Connection (±15 VDC Sensors) with Optional SPS Module
30
Ethercat Interface Connection
31
Logic I/O
32
Service Port Connection
33
Initial Operation
34
Device Identification Value
35
Ethercat Configuration
35
LOGIC I/O Configuration
44
Valve Configuration
45
Sensor Configuration
46
Zero
47
LEARN (Adaptive)
48
Pressure Control Configuration
50
Tuning of Control Performance
51
Tuning of Control Performance with Adaptive Pressure Controller
52
Tuning of Control Performance with Fixed PI Pressure Controller
57
Tuning of Control Performance with Soft Pump Pressure Controller
60
Ethercat Interface (General)
63
Ethercat Interface (Process Data - Cyclic Communication)
63
OUTPUT Buffer (Master PLC)
63
INPUT Buffer (Master PLC)
66
Ethercat Interface (Parameter Data - Acyclic Communication)
71
Ethercat Object Dictionary
71
Communication and Timing between Master (PLC) and Slave (VAT-Valve)
77
Operation
78
Normal Operation
78
Local Operation
78
Remote Operation
79
Close Valve
80
Open Valve
80
Position Control
80
Pressure Control
81
Pressure Control Operation with 2 Sensors
82
Display Information
83
Power up
83
Operation
84
Fatal Error
84
Ethercat Leds
84
Safety Mode
86
Service Indication
86
Operation During Power up
86
Behavior in Case of Power Failure
86
Operation under Increased Temperature
87
Trouble Shooting
88
Additional Ethercat Warning
91
Maintenance
92
Maintenance Intervals
92
Maintenance Procedures
93
Replacement of Shaft Feedthrough Seals and Valve Cleaning
94
Replacement of Option Board
98
Retrofit / Replacement Procedure
100
Repairs
104
Dismounting and Storage
105
Dismounting
105
Storage
106
Packaging and Transport
107
Packaging
107
Transport
108
Disposal
109
Spare Parts
110
Drawing
111
Sample Picture
111
ISO-KF Valve Unit - Aluminum Blank, Without Heating
112
ISO-KF Valve Unit - Stainless Steel, Without Heating
112
Seals and Grease
113
4
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VAT 612 Series Specifications
General
Brand
VAT
Model
612 Series
Category
Control Unit
Language
English
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