MAINTENANCE Series
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Edition 2018-08-20 605262EE
7.2.1 Replacement of shaft feedthrough seals and valve cleaning
7.2.1.1 Required tools
•
Allen Wrench 2 mm / 2.5mm
•
Allen Wrench 3 mm
•
Feeler gauge
•
Clean room wipes, isopropyl alcohol
•
Vacuum grease
Description
Required tool
Make sure that the valve is in closed position
1.
Vent vacuum system, disconnect electrical connections and remove valve from vacuum
system. If you only replace control and actuating unit, the valve can remain in the
system.
Take care not to damage sealing surface!
Do not move the plate by hands when control an actuating unit is installed.
Depending on
flange screws
2. Unfasten clamp coupling
Allen Wrench:
elastic coupling
2 mm
steel coupling
2.5 mm
3.
Unfasten the 2 connection bolts and separate
Valve size DN 160 (6”) and bigger require
a shortened wrench. For ordering number
refer to «Spare parts and accessories».
Allen Wrench
3 mm
4. Unfasten screws and remove plate from shaft.
Allen Wrench
3 mm
12 mm