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VAT 642 Series User Manual
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Series 642
INSTALLATIO
N
742280ED
Edit
ion 2017-11-24
17/
119
4.2.
2
Connecti
on overview
System:
1
V
alve
2
P
ressure sensor(s)
3
S
ensor cable(s)
4
C
able to RS232
remote control un
it
5
C
able to power supply
6
L
ink cable
Actuator
Controller
4.2.
3
Install
ation procedure
1.
Install valve [1] into the vacuum system, with valve s
eat side to process chamber. The valve seat side
is indicated by the symbol "
∆
" on th
e valve flange.
Master
Slave
[6] Link cable
[6] Link to next Slave
16
18
Table of Contents
Default Chapter
3
Table of Contents
3
1 Description of Product
5
Identification of Product
5
Use of Product
5
Used Abbreviations
5
Related Documents
5
Important Information
5
Technical Data
6
Control and Actuating Unit
6
Valve Unit
8
2 Safety
9
Compulsory Reading Material
9
Danger Levels
9
Personnel Qualifications
10
Safety Labels
10
3 Design and Function
11
Design
11
Function
11
Pressure Control System Overview and Function
12
Principle of a Pressure Control System
13
4 Installation
14
Unpacking
14
Installation into the System
15
Installation Space Condition
16
Connection Overview
17
Installation Procedure
17
Tightening Torque
18
Mounting with Centering Rings
19
Mounting with O-Ring in Grooves
20
Admissible Forces
21
Requirements to Sensor Connection
22
Electrical Connection
22
Ground Connection
23
4.5.2 Sensor Supply Concepts
24
Power and Sensor Connection (+24 VDC Sensors)
25
4.5.4 Power and Sensor Connection (±15 VDC Sensors) Without Opt. SPS Module
27
4.5.5 Power and Sensor Connection (±15 VDC Sensors) with Opt. SPS Module
29
Power Connection for Slave Valve Only
30
Service Port Connection
30
Valve Cluster Connection
31
Functions and Wiring
34
Initial Operation
37
Setup Procedure
37
Interface Configuration
38
Cluster Address Configuration
38
Valve Configuration
41
Sensor Configuration
41
Zero
42
LEARN (Adaptive)
43
Tuning of Control Performance
45
Tuning of Control Performance with Adaptive Pressure Controller
45
Tuning of Control Performance with Fixed PI Pressure Controller
51
Tuning of Control Performance with Soft Pump Pressure Controller
54
RS232 Interface Commands
56
RS232 Command Syntax
56
Control Commands
56
Inquiry Commands
57
Setup Commands
65
Pressure Control Algorithem
75
Error Messages
80
5 Operation
81
Normal Operation
82
Individual Valve Control
82
Individual Valve Status
83
Freeze Mode
83
Position Offset
83
Local Operation
84
Remote Operation
85
Close Valve
86
Open Valve
86
Position Control
86
Pressure Control
86
Display Information
88
Power up
88
Operation
89
Fatal Error
89
Safety Mode
90
Service Indication
90
Operation During Power up
90
Operation under Increased Temperature
91
6 Trouble Shooting
92
7 Maintenance
95
Maintenance Intervals
95
Maintenance Procedures
96
7.2.1 Replacement of Gate Seals and Valve Cleaning
97
Replacement of Option Board
102
Retrofit / Replacement Procedure
104
8 Repairs
107
9 Dismounting and Storage
108
Dismounting
108
Storage
109
10 Packaging and Transport
110
Packaging
110
Transport
111
11 Disposal
112
12 Spare Parts
113
Drawing
114
Valve Unit with Seals and Grease
115
Controller
116
Accessories
116
13 Appendix
118
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107 pages
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VAT 642 Series Specifications
General
Brand
VAT
Model
642 Series
Category
Control Unit
Language
English
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