VAT 642 Series User Manual

OPERATION
Series
642
86/119 Edition 2017-11-24 742280ED
5.1.7 Close valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter: «Control commands» for
details)
Push CLOSE button Send CLOSE VALVE
5.1.8 Open valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter: «Control commands» for
details)
Push OPEN button Send OPEN VALVE
5.1.9 Position control
The valve position is directly controlled according to the position setpoint.
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter: «Control commands» for
details)
Select or enter position setpoint Send POSITION CONTROL
5.1.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control performance.
Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means
of the valve position. The PID controller works with an adaptive algorithm to achieve best results under
altering conditions (gasflow, gas type).
Local operation:
(‘Control View’, ‘Control Performance Analyzer’
or ‘Service Box 2‘)
Remote operation:
(Refer to chapter: «Control commands» for details)
Select or enter pressure setpoint Send PRESSURE CONTROL

VAT 642 Series Specifications

General

Brand	VAT
Model	642 Series
Category	Control Unit
Language	English