CKD RAPIFLOW FSM3 Series User Manual

4
How to order
FSM3
Series
Compatibility table of ow rate range and port size, needle valve option, and EXA connection
tting
E
Port size
F
Piping direction
BH1 CH1 DH1 EH1 HH1 JH1 BH2 CH2 DH2 EH2 HH2 JH2 AA1 BA1
B
Flow rate
005
010
020
050
100
200
500
101
201
501
102
CA1 AA2 BA2 AB1 BB1 CB1 AB2 BB2 AC1 BC1 CC1 AC2 BC2
005
010
020
050
100
200
500
101
201
501
102
: Port compatibility : Needle valve option compatibility : EXA connection tting compatibility
Compatibility table of port size and clean-room specications
E
Port size
F
Piping direction
BH1 CH1 DH1 EH1 HH1 JH1 BH2 CH2 DH2 EH2 HH2 JH2 AA1 BA1
M
Clean-room specications
Blank
P70
P80
CA1 AA2 BA2 AB1 BB1 CB1 AB2 BB2 AC1 BC1 CC1 AC2 BC2
Blank
P70
P80
LCD display Bar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

CKD RAPIFLOW FSM3 Series Specifications

General

Brand	CKD
Model	RAPIFLOW FSM3 Series
Category	Accessories
Language	English