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CKD RAPIFLOW FSM3 Series User Manual

CKD RAPIFLOW FSM3 Series
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31
Flow rate sensor selection method
1
Use as a guide for selection of the flow rate range when using the flow rate sensor for suction/unload confirmation or leakage
inspection, etc., with the suction nozzle.
The flow rate can be calculated using the effective cross-sectional area of nozzle (pinhole) and the pressure difference inside and
outside of nozzle.
For P1 ≥ 1.89P
2
(acoustic velocity)
Q = 113.2 × S × P
1
For P1 < 1.89P
2
(subsonic velocity)
Q : Flow rate ℓ/min
P
1
: Primary side absolute pressure MPa
P
2
: Secondary side absolute pressure MPa
S : Effective cross-sectional area of nozzle (pinhole) mm
2
Example of calculation
The figure below shows the calculated value of flow rate when the nozzle diameter is φ0.1 to φ2 and P2 is varied.
P
1
(MPa)
Absolute
pressure
P
1
(MPa)
Gauge
pressure
P
2
(MPa)
Absolute
pressure
P
2
(MPa)
Gauge
pressure
Acoustic velocity/
subsonic velocity
Calculated flow rate value (ℓ/min)
φ0.1 φ0.2 φ0.3 φ0.4 φ0.5 φ0.7 φ1 φ1.5 φ2
Vacuum
0.1013 0 0.0313
-
0.07
Acoustic velocity
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0413
-
0.06
Acoustic velocity
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0513
-
0.05
Acoustic velocity
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0613
-
0.04
Subsonic velocity
0.088 0.352 0.792 1.408 2.200 4.312 8.800 19.801 35.202
0.1013 0 0.0713
-
0.03
Subsonic velocity
0.082 0.329 0.740 1.315 2.055 4.028 8.220 18.494 32.878
0.1013 0 0.0813
-
0.02
Subsonic velocity
0.072 0.287 0.645 1.147 1.792 3.512 7.166 16.125 28.666
0.1013 0 0.0913
-
0.01
Subsonic velocity
0.054 0.215 0.483 0.859 1.343 2.631 5.370 12.083 21.480
Blow (leakage inspection)
0.1113 0.01 0.1013 0
Subsonic velocity
0.057 0.226 0.509 0.905 1.414 2.772 5.657 12.727 22.626
0.1213 0.02 0.1013 0
Subsonic velocity
0.080 0.320 0.720 1.280 2.000 3.920 8.000 17.999 31.998
0.1413 0.04 0.1013 0
Subsonic velocity
0.113 0.453 1.018 1.810 2.828 5.543 11.313 25.454 45.252
0.1613 0.06 0.1013 0
Subsonic velocity
0.139 0.554 1.247 2.217 3.464 6.789 13.856 31.175 55.423
0.1813 0.08 0.1013 0
Subsonic velocity
0.160 0.640 1.440 2.560 4.000 7.840 15.999 35.998 63.996
0.2013 0.1 0.1013 0
Acoustic velocity
0.179 0.716 1.610 2.862 4.472 8.765 17.888 40.248 71.552
0.3013 0.2 0.1013 0
Acoustic velocity
0.268 1.071 2.410 4.284 6.694 13.119 26.774 60.242 107.096
0.4013 0.3 0.1013 0
Acoustic velocity
0.357 1.426 3.209 5.706 8.915 17.474 35.660 80.236 142.641
0.5013 0.4 0.1013 0
Acoustic velocity
0.445 1.782 4.009 7.127 11.137 21.828 44.547 100.230 178.186
0.6013 0.5 0.1013 0
Acoustic velocity
0.534 2.137 4.809 8.549 13.358 26.182 53.433 120.224 213.731
(CAUTION)
When there is a leakage in the piping, etc., the actual flow rate becomes larger than the calculated value. When selecting the flow rate, consider the
amount of leakage in the piping.
When there is a portion narrower than the suction nozzle diameter in the middle of the piping, the flow rate may be reduced to lower than the
calculated value. In addition, suction confirmation, etc., may become impossible.
The effective cross-sectional area is just a guideline. When the nozzle is long and thin, the effective cross-sectional area becomes smaller than the
opening area.
The response time is determined by the inner volume of the piping from the flow rate sensor to suction nozzle (pinhole). For high-speed detection,
reduce the inner volume of the piping as much as possible by installing a flow rate sensor near the suction nozzle, etc.
FSM3
Series
Q = 226.4 × S × P
2
(P1 − P
2
)
P
2
: Vacuum
Suction nozzle
Pinhole
P
1
: Atmospheric pressure
P
1
: Pressurization
P
1
: Pressurization
P
2
: Atmospheric pressure
P
2
: Atmospheric pressure
LCD displayBar display
IO-Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

Table of Contents

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CKD RAPIFLOW FSM3 Series Specifications

General IconGeneral
BrandCKD
ModelRAPIFLOW FSM3 Series
CategoryAccessories
LanguageEnglish

Summary

Compact Flow Rate Sensor RAPIFLOW® FSM3 Series

Product Features and Capabilities

Diversified Gas Measurement

Five types of gases can be measured with just one unit.

High Performance Characteristics

Covers pressure loss reduction, high precision, and bi-directional measurement.

Clean-Room Specifications

Availability of clean-room compliant models for specific applications.

IO-Link Integration and User-Friendly Design

Introducing the IO-Link Model

Benefits and features of IO-Link communication for data transfer.

User-Friendly Design Elements

Features like rotatable display, various fittings, easy mounting, and space saving.

Solution Examples

Leakage Inspection Application

Using the sensor for leak detection in piping systems.

Air Consumption Maintenance Application

Monitoring air consumption of facilities using air devices.

Painting Air Flow Rate Control Application

Controlling flow rate during coating with electro-pneumatic regulators.

Application Examples

Confirming Electronic Part Suction

Detecting electronic parts suction using flow rate.

Arc Welding Gas Flow Control

Maintaining flow rate for shielding gases in arc welding.

Electronic Part Installation Wire Tension Control

Controlling gold wire tension for electronic part installation.

Series Variation Overview

LCD Display Models

Overview and specifications for LCD display variants.

Bar Display Models

Overview and specifications for Bar display variants.

IO-Link Models

Overview and specifications for IO-Link variants.

LCD Display Specifications

How to Order

Model Number Selection Guide

Explains model number codes, options, and selection precautions.

Dimensions (LCD Display)

Dimensions (Bar Display)

Bar Display Specifications

IO-Link Specifications

How to Order / Dimensions (Separated Display)

Separated Display Dimensions

Physical dimensions for the FSM2 separated display unit.

Dimensions (IO-Link)

Internal Structure Details

FSM3-B005 to 500 Internal Structure

Details of internal components for FSM3-B models 005 to 500.

FSM3-L500 to 201 Internal Structure

Details of internal components for FSM3-L models 500 to 201.

Internal Structure Details

FSM3-L501/102 Internal Structure

Details of internal components for FSM3-L models 501 and 102.

Separate Display FSM2-D Internal Structure

Internal structure details for the FSM2-D separate display.

Separated Display Specifications

Example Internal Circuit and Load Connection

LCD Display NPN Output Circuit Example

Wiring diagram for LCD display with NPN output.

LCD Display PNP Output Circuit Example

Wiring diagram for LCD display with PNP output.

Example Internal Circuit and Load Connection

LCD Display NPN Output with Copy Function

Wiring diagram for LCD display with NPN output and copy function.

LCD Display PNP Output with Copy Function

Wiring diagram for LCD display with PNP output and copy function.

LCD Display Copy Function Circuit

Circuit diagram for using the copy function with LCD display.

Example Internal Circuit and Load Connection

Bar Display Circuit Connection Example

Wiring diagram for bar display and connection.

Connecting Separate Display to Bar Display

Guide for connecting the separate display to the bar display.

Analog Output Characteristics

Performance curves showing analog output behavior.

Names and Functions of Display/Operation Section (LCD Display)

LCD Display Error Codes and Countermeasures

Troubleshooting guide for error codes displayed on the LCD.

Names and Functions of Display/Operation Section

SET Mode Functions Overview

Details on configuration settings available in SET mode.

Maintenance Mode Functions Overview

Functions available for device maintenance.

Names and Functions of Display/Operation Section (Bar Display)

Bar Display Error Codes and Countermeasures

Troubleshooting guide for error codes displayed on the bar display.

Names and Functions of Display/Operation Section (IO-Link)

IO-Link Communication Specifications

Details on IO-Link protocol version, bit rate, and data format.

Names and Functions of Display/Operation Section (IO-Link)

IO-Link Data Range Table

Data mapping table for IO-Link process data.

Names and Functions of Display/Operation Section

Setting Monitor Mode Functions Overview

Functions for checking SET mode settings.

Product Weight Information

Safety Precautions and Disclaimer

General Safety Guidelines

Essential safety information for handling, usage, and maintenance.

Limited Warranty Information

Details on warranty terms, scope, and exclusions.

Safety Precautions

Working Fluids and Environment Considerations

Guidelines for suitable fluids, operating environments, and temperature.

Product-Specific Cautions

Flow Rate Unit and Overflow Cautions

Notes on flow rate units, overflow handling, and pressure difference.

Needle Valve Integrated Cautions

Specific warnings and precautions for needle valve integrated models.

Suction Confirmation Cautions

Precautions for using the product in suction applications.

Product-Specific Cautions

Piping Installation Precautions

Guidelines and precautions for proper piping installation.

Mounting Installation Precautions

Guidelines and precautions for proper mounting.

Product-Specific Cautions

Wiring and Adjustment Cautions

Precautions regarding wiring connections and adjustments.

Product-Specific Cautions

Use and Maintenance Precautions

Guidelines for product usage, maintenance, and troubleshooting.

Product-Specific Cautions

Separated Display FSM2-D Cautions

Specific cautions for the FSM2-D separated display unit.

Mounting, Installation, and Adjustment Guide

Detailed guide for mounting and adjusting the product.

Related Products Overview

FSM3 Series Product Information

Overview of the FSM3 series flow rate sensors and their applications.

FCM Series Flow Rate Controller

Information on the related FCM series flow rate controllers.

FCS500/FCS1000 Inline Clean Filter

Information on related inline clean filters for various applications.

Related Products Overview

EVS2 Series Electro Pneumatic Regulator

Information on the EVS2 series compact electro pneumatic regulators.

EVR Series Electro Pneumatic Regulator

Information on the EVR series high precision electro pneumatic regulators.

PPX Series Digital Pressure Sensor

Information on the PPX series digital pressure sensors.

Product-Specific Cautions

Piping Installation Precautions

Precautions for correct piping installation and thread sealing.

Mounting Installation Precautions

Precautions for correct mounting, including temperature effects.

Product-Specific Cautions

Wiring and Adjustment Precautions

Precautions for wiring, surge protection, and adjustments.

Product-Specific Cautions

Use and Maintenance Precautions

Precautions for product usage, maintenance, and preventing damage.

Product-Specific Cautions

Separated Display FSM2-D Mounting, Installation, Adjustment

Guide for mounting, installing, and adjusting the FSM2-D separated display.

World Network Information

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