CKD RAPIFLOW FSM3 Series User Manual

13
Compact ow rate sensor RAPIFLOW
FSM3 Series
IO-Link
Resin body (ow rate range: 500 mL/min to 1000 L/min)
IO-Link specications
Descriptions
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
[B]
005 010 020 050 100 200 500 101 201 501 102
Flow
direction
[C]
U Uni-direction
B Bi-direction
Measured
ow rate
range
(
/min) *1
[C]
U
15 to
500 mL
30 to
1000 mL
0.06 to
2.00 L
0.15 to
5.00 L
0.30 to
10.00 L
0.6 to
20.0 L
1.5 to
50.0 L
3.0 to
100.0 L
6 to
200 L
15 to
500 L
30 to
1000 L
B
−500 to −15,
15 to 500 mL
−1000 to −30,
30 to 1000 mL
−2.00 to −0.06,
0.06 to 2.00 L
−5.00 to −0.15,
0.15 to 5.00 L
−10.00 to −0.30,
0.30 to 10.00 L
−20.0 to −0.6,
0.6 to 20.0 L
−50.0 to −1.5,
1.5 to 50.0 L
−100.0 to −3.0,
3.0 to 100.0 L
−200 to −6,
6 to 200 L
−500 to −15,
15 to 500 L
−1000 to −30,
30 to 1000 L
Display LED display (power lamp, status lamp)
Working uid
Applicable
uids *2
Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas
Temperature range 0 to 50°C (no condensation)
Pressure range −0.07 to 0.75 MPa 0 to 0.75 MPa
Proof pressure 1 MPa
Operating ambient temperature/humidity 0 to 50 °C, 90% RH or less
Storage temperature −10 to 60°C
Accuracy
*3
(Fluid: in dry air)
Accuracy *4
Within ±3% F.S. (Secondary side released to atmosphere) (Scope of warranty depends on the "Measured ow rate range")
Repeatability
*5
Within ±1%F.S. (Secondary side released to atmosphere)
Temperature
characteristics
Within ±0.2% F.S./°C (15 to 35°C, base temperature 25°C)
Pressure
characteristics
Within ±5% F.S. (−0.07 to 0.75 MPa, secondary side is released to atmosphere)
Within ±5% F.S.
(0 to 0.75 MPa, base pressure 0.35 MPa)
Response time *6 50 msec or less
Power supply voltage 18 to 30 VDC ripple rate 1% or less
Current consumption *7 45 mA or less
Lead wire *8 M12 both ends connector cable (3 m) AWG #23 or equivalent 4 conductor
Functions *9
1
Change gas type,
2
ow rate adjustment,
3
peak hold, etc.
Degree of protection IP40-equivalent (IEC standards)
Protection circuit *10 Power supply reverse connection protection
Vibration resistance *11 10 to 150 Hz, max. 100 m/s
2
, X, Y, Z direction, every 2 hours
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting
Mounting orientation *12 Unrestricted in vertical/horizontal direction
Straight piping
installation section *13
Not required
* Refer to page 37 for communication specications.
LCD displayBar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

CKD RAPIFLOW FSM3 Series Specifications

General

Brand	CKD
Model	RAPIFLOW FSM3 Series
Category	Accessories
Language	English