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Compact flow rate sensor RAPIFLOW
®
FSM3 Series
Catalog No. CC-1381A
Inline clean filter FCS500/FCS1000 Series
Catalog No. CB-024SA
FSM3
Series
Compact ow rate controller (RAPIFLOW) FCM Series
Compact/high speed/high precision
Compatible with various fluids
Capable of 0.5 sec high speed control
Built-in digital display to check control state
at a glance
Built-in microcomputer enables various types
Catalog No. CB-024SA
Ideal as a final filter for clean applications.
(For air and inert gas)
0.01 μm high precision ltration, 99.99% removal efciency
Hollow fiber membrane element has enabled 0.01 μm high precision
filtration and 99.99% removal efficiency.
Long service life
Considerably longer service life. Approximately five times longer than the
flat membrane.
Compact/lightweight/large ow rate
Three to ten times filtration area enables larger flow rate and less pressure
loss than the flat membrane of the same capacity. If the flow rate is the
same, the hollow fiber membrane can be more compact and lighter.
Oil-prohibited specications
Parts are all degreased and cleaned. The manufacturing processes from
assembling to packaging are performed in clean room.
Easy maintenance
As the case of resin is transparent, it is easy to visually check for dirt of the
element.
Wide range of choices
Two kinds of flow rate (500 and 1000 Series), resin and stainless steel
materials, and the mounting options of push-in fitting, male thread piping
and female thread piping are available.
Compact ow rate sensor 3 series for various
applications
Stainless steel body
Five types of gases can be measured with just one
unit
Reduction of pressure loss
High precision/high-speed response
Bi-directional uid measurement
Rotatable LCD display
Wide variation of ttings
51
LCD displayBar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
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products
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