CKD RAPIFLOW FSM3 Series User Manual

1
Compact ow rate sensor RAPIFLOW
FSM3 Series
LCD display
Resin body (ow rate range: 500 mL/min to 1000 L/min)
LCD display specications
Descriptions
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
[B]
005 010 020 050 100 200 500 101 201 501 102
Flow
direction
[C]
U Uni-direction
B Bi-direction
Measured
ow rate
range
(
/min) *1
[C]
U
15 to
500 mL
30 to
1000 mL
0.06 to
2.00 L
0.15 to
5.00 L
0.30 to
10.00 L
0.6 to
20.0 L
1.5 to
50.0 L
3.0 to
100.0 L
6 to
200 L
15 to
500 L
30 to
1000 L
B
−500 to −15,
15 to 500 mL
−1000 to −30,
30 to 1000 mL
−2.00 to −0.06,
0.06 to 2.00 L
−5.00 to −0.15,
0.15 to 5.00 L
−10.00 to −0.30,
0.30 to 10.00 L
−20.0 to −0.6,
0.6 to 20.0 L
−50.0 to −1.5,
1.5 to 50.0 L
−100.0 to −3.0,
3.0 to 100.0 L
−200 to −6,
6 to 200 L
−500 to −15,
15 to 500 L
−1000 to −30,
30 to 1000 L
Display 4-digit + 4-digit 2-color LCD
Flow rate
display
range
(
/min) *2
[C]
U
−49 to
549 mL
−99 to
1099 mL
−0.19 to
2.19 L
−0.49 to
5.49 L
−0.99 to
10.99 L
−1.9 to
21.9 L
−4.9 to
54.9 L
−9.9 to
109.9 L
−19 to
219 L
−49 to
549 L
−99 to
1099 L
B
−549 to
549 mL
−1099 to
1099 mL
−2.19 to
2.19 L
−5.49 to
5.49 L
−10.99 to
10.99 L
−21.9 to
21.9 L
−54.9 to
54.9 L
−109.9 to
109.9 L
−219 to
219 L
−549 to
549 L
−1099 to
1099 L
Integration
display *3
Display range 0 to ±9999999 mL 0.00 to ±99999.99 L 0.0 to ±999999.9 L 0 to ±9999999 L
Pulse
output rate
5 mL 10 mL 0.02 L 0.05 L 0.1 L 0.2 L 0.5 L 1 L 2 L 5 L 10 L
Working
conditions
Applicable
uids *4
Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas
Temperature range 0 to 50°C (no condensation)
Pressure range −0.07 to 0.75 MPa 0 to 0.75 MPa
Proof pressure 1 MPa
Operating ambient temperature/humidity 0 to 50°C, 90% RH or less
Storage temperature −10 to 60°C
Accuracy *5
(Fluid: in dry air)
Accuracy *6 Within ±3% F.S. (Secondary side released to atmosphere) (Scope of warranty depends on the "Measured ow rate range")
Repeatability
*7
Within ±1% F.S. (Secondary side released to atmosphere)
Temperature
characteristics
Within ±0.2% F.S./°C (15 to 35°C, base temperature 25°C)
Pressure
characteristics
Within ±5% F.S. (−0.07 to 0.75 MPa, where secondary side is released to
atmosphere)
Within ±5% F.S.
(0 to 0.75 MPa, base pressure 0.35 MPa)
Response time *8 50 msec or below (Response time set to OFF)
Switch
output
[G]
A, B, E, F NPN open collector output (50 mA or less, voltage drop 2.4 V or less)
C, D, G, H PNP open collector output (50 mA or less, voltage drop 2.4 V or less)
Analog
output *9
A, B, C, D 1 to 5 V voltage output (connecting load impedance 50 kΩ and over)
E, F, G, H 4 to 20 mA current output (connecting load impedance 0 to 300 Ω)
Power supply
voltage *10
A, B, C, D 12 to 24 VDC (10.8 to 26.4 V) ripple rate 1% or less
E, F, G, H 24 VDC (21.6 to 26.4 V) ripple rate 1% or less
Current consumption *11 45 mA or less
Lead wire φ3.7, AWG26 or equivalent × 5-conductor (connector), insulator outer diameter φ1.0
Functions *12
1
Gas change,
2
setting detail copy,
3
ow rate adjustment,
4
peak hold, etc.
Degree of protection IP40-equivalent (IEC standards)
Protection circuit *13
Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
Vibration resistance 10 to 150 Hz, max. 100 m/s
2
, X, Y, Z direction, every 2 hours
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting
Mounting orientation *14 Unrestricted in vertical/horizontal direction
Straight piping
installation section *15
Not required
LCD displayBar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

CKD RAPIFLOW FSM3 Series Specifications

General

Brand	CKD
Model	RAPIFLOW FSM3 Series
Category	Accessories
Language	English