CKD RAPIFLOW FSM3 Series User Manual

2
Specifications
FSM3
Series
*1:Thevalueconvertedtovolumetricowrateatstandardcondition(20°C1barometricpressure(101kPa)relativehumidity65%RH)
(Forgasesotherthanair,20°C,1atmosphericpressure(101kPa),relativehumidity0%RH.)
*2:Thedisplaysofvariousowratesareasshownbelow.
*3:Theintegratingowisacalculated(reference)value.Whenusingtheintegrationmaintainingfunction,becarefulthatthenumberoftimes
maintaineddoesnotexceedthenumberofaccesstimesofthestorageelement(thelimitis1milliontimes).(Changestothesettingsare
countedinnumberofaccesses.)
Wheninstantaneousowrateisbelow1%itisnotcountedasintegratingow.
*4:Usedrygaswhichdoesnotcontaincorrosiveelementssuchaschlorine,sulfuroracids,andwhichiscleananddoesnotcontaindustor
oilmist.Whenusingcompressedair,usecleanairthatcomplieswithJISB8392-1:2012Class1.1.1to1.6.2.Compressedairfromthe
compressorcontainsdrain(water,oiloxide,foreignsubstances,etc.).Tomaintainthefunctionofthisproduct,installalter,airdryer(min.
pressuredewpoint10°Corless),andoilmistlter(max.oilcontent0.1mg/m
3
)ontheprimaryside(upstreamside)ofthisproduct.(Refer
totherecommendedvaluesonpage42.)
*5:Compressedairisusedforadjustingandinspectingthisproduct.Accuracyforgastypesotherthanairisaguideline.
*6:TheaccuracyisbasedonCKD'sbasicowratemeter.Itdoesnotshowabsoluteaccuracy.
*7:Repeatabilityoverashortperiodoftime.Changeovertimeisnotincluded.(Refertotheproductspecicationssheetfordetails.)
*8:Actualresponsetimemaydifferdependingonpipingconditions.Settingresponsetimecanbeselectedfrombetween50msecto1.5sec.
*9:Theoutputimpedanceoftheanalogoutputsectionisapprox.1kΩ.Iftheimpedanceoftheconnectingloadissmall,outputanderror
increase.Checkerrorwiththeimpedanceoftheconnectingloadbeforeusing.
*10: Thepowersupplyvoltagespecicationsdifferforthevoltageoutputandcurrentoutput.
*11: Currentforwhen24VDCisconnectedandnoloadisapplied.Thecurrentconsumptionwillvarydependingonhowtheloadisconnected.
*12:Gascanbechangedtoargon,carbondioxide,andargon80%+carbondioxide20%withthegaschangefunction.Fullscaleowrate
andanalogoutputafterchanginggasisasfollows.(Notethatthe500L/minand1,000L/minmodelsdonothaveagaschangefunction.)
Gas Flow direction Full scale ow rate
Analog output
Voltage Current
Air
Nitrogen
Argon
Argon80%+
Carbondioxide20%
Uni-direction 0to100%
1to5V 4to20mA
Bi-direction −100to100%
Carbondioxide
Uni-direction 0to50% 1to3V 4to12mA
Bi-direction −50to50% 2to4V 8to16mA
The"Copyfunction”settingisselectedat"
G
Outputspecications".
Notethatthe"Externalinput"functionisnotavailableonmodelsonwhichthe"Copyfunction"isenabled.
*13:Thisproduct'sprotectioncircuitiseffectiveonlyforspecicmisconnectionsandloadshort-circuits.Itdoesnotprovideprotectionforall
misconnections.
*14:Thisproductmeasuresthechangeinheatdistributioncausedbyow.
 Whensettohorizontaldirection,theconvectionowcaninuenceachangeinheatdistribution,causingthezeropointtoshift.
*15:Pipingconditionsmayaffectaccuracy.Formoreaccuratemeasurements,useastraightpipewithaninternaldiametertentimesgreater.
Withthe500L/minand1,000L/minmodels,usepipingwithaninternaldiameterof9mmormore.Ifitislessthan9mm,accuracymay
benegativelyaffected.
*16:Refertopage32forweight.
Times maintained = < 1 million
Usagetime
5min
Uni-direction
[Lo]display [Hi]display[0]display
0 1 3 100%
− 10 − 1 110%
Measuredowraterange
[Lo]display [Hi]display[0]display
0 1 3 100%
− 100% − 110% − 3 − 1 110%
MeasuredowraterangeMeasuredowraterange
Bi-directional
LCD display Bar display
IO
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CKD RAPIFLOW FSM3 Series Specifications

General

Brand	CKD
Model	RAPIFLOW FSM3 Series
Category	Accessories
Language	English