CKD RAPIFLOW FSM3 Series User Manual

Intro1
Series
variation
For compact ow rate sensor RAPIFLOW
FSM3 Series
Appearance
Applicable
uids
Flow rate
adjusting bar
EXA
Connection
tting
Clean-room specications
Port size
Max. ow rate (L/min)
Description
page
P70 P80 0.5 1 2 5 10 20 50 100 200 500 1000
LCD display
Air
Nitrogen
φ4
1
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
Bar display
φ4
7
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
IO-Link
φ4
13
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2

CKD RAPIFLOW FSM3 Series Specifications

General

Brand	CKD
Model	RAPIFLOW FSM3 Series
Category	Accessories
Language	English