8
Specifications
FSM3
Series
*1: The value converted to volumetric ow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%)
*2: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or
oil mist. When using compressed air, use clean air that complies with JIS B 8392-1:2012 Class 1.1.1 to 1.6.2. Compressed air from the
compressor contains drain (water, oil oxide, foreign substances, etc.) To maintain the function of this product, install a lter, air dryer (min.
pressure dew point 10°C or less), and oil mist lter (max. oil content 0.1 mg/m
3
) on the primary side (upstream side) of this product. (Refer
to the recommended values on page 42.)
*3: The accuracy is based on CKD's basic ow rate meter. It does not show absolute accuracy.
*4: Repeatability over a short period of time. Change over time is not included. (Refer to the product specications sheet for details.)
*5: Actual response time may differ depending on piping conditions.
*6: The output impedance of the analog output section is approx. 1 kΩ. If the impedance of the connecting load is small, output and error
increase. Check error with the impedance of the connecting load before using.
*7: The power supply voltage specications differ for the voltage output and current output.
*8: Current for when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is connected.
*9: This product's protection circuit is effective only for specic misconnections and load short-circuits. It does not provide protection for all
misconnections.
*10: This product measures the change in heat distribution caused by ow.
When set to horizontal direction, the convection ow can inuence a change in heat distribution, causing the zero point to shift.
*11: Piping conditions may affect accuracy. For more accurate measurements, use a straight pipe with an internal diameter ten times greater.
With the 500 L/min and 1,000 L/min models, use piping with an internal diameter of 9 mm or more. If it is less than 9 mm, accuracy may
be negatively affected.
*12: Refer to page 32 for weight.
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