Keithley S530 User Manual

S530 Parametric Test System Test Subroutine Library User's Manual Section 3: Test subroutine library reference
S530-907-01 Rev. A / September 2015 3-57
res4
This subroutine measures the resistance of a four-terminal resistor.
Usage
double res4(int his, int him, int los, int lom, int sub, double itest)
his
Input
The HI source pin of the device
him
Input
The HI measure pin of the device
los
Input
The LO source pin of the device (ground)
lom
Input
The LO measure pin of the device
sub
Input
The substrate pin of the device
itest
Input
The forced current, in amperes
Returns
Output
The calculated resistance:
 0.0 = Measured voltage is < 0.002 V
 2.0E+21 = Measured voltage is within 98 % or the 40 V voltage
limit
Details
This subroutine calculates the resistance of a four-terminal resistor (usually a van der Pauw structure)
by forcing current and measuring the voltage. All device pins must be unique.
If a positive substrate pin is specified, the substrate is grounded. If a positive substrate pin is not
specified, the substrate is left floating.
A delay is incorporated into the res4 subroutine; this delay is the calculated time required for stable
forcing of itest with a 40 V voltage limit.
Source-measure units (SMUs)
 SMU1: Forces itest, 40 V voltage limit
 SMU2: Set to VMTR, measures voltage
Example
result = res4(his, him, los, lom, sub, itest)
Schematic

Keithley S530 Specifications

General

Brand	Keithley
Model	S530
Category	Test Equipment
Language	English