Keithley S530 User Manual

S530 Parametric Test System Test Subroutine Library User's Manual Section 3: Test subroutine library reference
S530-907-01 Rev. A / September 2015 3-77
The procedural differences are:
 A binary search on V
GS
is done to find I
DS
(vstart)
 Calculate sweep limits: The vlow parameter = vstart
 The vhigh parameter = vstart + npts * vstep
 Sweep the I
DS
-V
GS
data set
 Perform a sliding five-point linear least-squares (LLSQ) analysis (as in the vtext subroutine)
If a zero or negative substrate pin is specified, the substrate is left floating. If the pin number is
greater than 0 and V
BS
is less than 0.9 mV, the substrate is grounded. In all other cases, it is
connected and forced.
The npts parameter must be greater than 5. If a value less than 5 is used, the subroutine uses 5
points by default.
V/I polarities
The polarities of V
DS
and I
THR
are determined by the device type.
The vstep parameter is 10 mV to 100 mV. This depends on the vlow and vhigh parameters. For
an N-channel, if vlow = 0.0 and vhigh = 2.0, vstep should be positive.
Source-measure units (SMUs)
 SMU1: Forces vds, default current limit, measures I
DS
 SMU2: Searches V
GS
, default current limit
 SMU3: Forces vbs, default current limit
Example
result = vtext2(d, g, s, sub, type, vlow, vhigh, vds, vbs, ithr, vstep, npts,
&slope, &kflag)
Schematic

Keithley S530 Specifications

General

Brand	Keithley
Model	S530
Category	Test Equipment
Language	English