Q150T Sample Preparation System
10473 - Issue 5 38 Q150T - Instruction Manual
How to create a conductive carbon layer for SEM
1. Install the carbon insert as described on page 56. Ensure that the carbon rods are
prepared correctly as described on page 57.
2. Ensure the stage is fitted with the longer support shaft adjusted to a height of
75mm above the base plate.
3. Ensure the extended height cylinder 10429 is fitted as described on page 69.
4. Create a new profile based on QT Ramped Carbon.
5. Edit the newly created profile setting the parameters as shown in Table 9.
6. Run the new profile.
Table 9 QT Ramped Carbon parameters for SEM coatings
Parameter Value
Material Carbon
Evaporation Current 52A
Evaporation Time 1.8 minutes
Current ramp rate 0.25A/S
Out Gas Time 10 seconds
Out Gas Current 20A
Pre Evap End Current 32
Pre Evap Rate 1.00 A/S