Quorum Q150T S User Manual

Q150T Sample Preparation System
10473 - Issue 5 54 Q150T - Instruction Manual
7 Accessories
The QT150T can be configured for various sputtering and evaporation applications. This
section describes the installation of:
 Sputter insert pre-installed as standard on Q150T S and Q150T ES models. Includes
instructions for changing the target. Additional sputter insert available (10453).
 Carbon rod insert for 3mm rods (10033) pre-installed as standard on Q150T E
models. Carbon rod insert for 6mm rods (10456).
 Carbon fibre insert (10455)
 Metal evaporation insert (10457) including its configuration for both downwards and
upwards evaporation, and the installation of a wire basket or molybdenum boat).
 Glow discharge insert (10262).
 Rotacota stage (10360)
 Slide stage (10358)
 Four wafer stage and gear box (10458)
 Specimen stage with adjustable tilt (10357)
 Film thickness monitor (10454)
 Extended height cylinder (10429)
 Full range vacuum gauge assembly (10428)
 Rotating vacuum spigot (10422)
 Emergency stop module (11223)
7.1 Sputter Insert
This section describes the installation of the standard sputter head supplied with Q150TS
and Q150T ES instruments.
WARNING – HIGH VOLTAGES AND HIGH VACUUM
This equipment produces high voltages and high vacuum in its
operation.
Figure 7-1. Top view of the sputter insert
1. Check the machine is not operating.
2. Press down firmly on the top cover to release the latch.
3. Lift the top cover and rest it against its stop.
Sputter insert lead
Securing button
Sputter insert
Latch
Lifting handle

Quorum Q150T S Specifications

General

Brand	Quorum
Model	Q150T S
Category	Laboratory Equipment
Language	English