HRX-OM-W002-A
Chapter 6 Option
HRR Series 6.1 Option DM
【
Electric conductivity control function , DI water (pure water) piping
】
Chapter 6 Option
6.1 Option DM【Electric conductivity control function ,
DI water (pure water) piping】
6.1.1 Option DM【Electric conductivity control function , DI water
(pure water) piping】
This function is available for customers who selected option DM(Electric
conductivity control function , DI water (pure water) piping). By entering the
set value of electric conductivity and hysteresis, flow of circulating fluid to the
DI filter is controlled by the solenoid valve to control electric conductivity. The
measurement range and setting range are as follows.
Measurement range of
electric conductivity
Set range of
target electric conductivity
Set range of
electric conductivity hysteresis
*1 Default setting is set to ”Electric conductivity set value:
25.0 μS / cm" and “hysteresis: 5.0 μS / cm”
Example of operation of electric conductivity control
The solenoid valve for electric conductivity
control can be made normally open/normally closed.
(This function is available in operation.)
Electric conductivity
control method
The solenoid valve
opens and closes and
conductivityis controlled.
The solenoid valve
normally open
The solenoid valve
normally closed
Electric conductivity target value : 25.0 [µS / cm]
Electric conductivity control hysteresis : 5.0 [µS / cm]
Set value of target
electric conductivity