VAT 653 Series User Manual

Series 65 INSTALLATION
963283EA Edition 2019-05-03 57/
129
4.10.3 Choose correct control algorithm
Select the configuration what your application needs.
System Configuration
Constant gas flow available
Constant gas flow
not available
Tv*<= 500 sec Tv* > 500 sec
Adaptive pressure
controller
Fixed pressure controller
Fixed pressure controller
Soft Pump Soft Pump
Use the formula below to define the applicable pressure control algorithm.
q
L
gasflow for learn [mbarl/s]
p
SFS
sensor full scale pressure [mbar]
Tv* Vacuum time constant [sec]
CV Chamber Volume [l]
P
SFS
•
CV
Tv =
q
L
Upstream
Process
chamber
Control
valve
Pump
Downstream
Process
chamber
Control
valve
Pump

VAT 653 Series Specifications

General

Brand	VAT
Model	653 Series
Category	Control Unit
Language	English