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1 Safety Precautions
1.1 Introduction
Thank you so much for purchasing the CSUX1FW: Filter Wheel for CSU.
This manual covers the features, operation methods and procedures, safety and
handling precautions of the CSUX1FW.
Before you start to use the unit, read this manual thoroughly and operate the
unit in a proper manner.
After read the annual through, keep the manual in a safe place for future quick
reference.
1.2 Caution
• No part of the user’s manuals may be transferred or reproduced without
prior written consent from YOKOGAWA.
• YOKOGAWA continues to improve the product’s performance and features,
and for this reason, the specifications and information herein are subject to
change at any time and without notice.
• The authors and publishers of this manual have used their best efforts in
preparing this document, but make no representation or warranties with
respect to the accuracy, applicability, fitness, or completeness of the
contents of this manual. If you have noticed any problems or have any
suggestions for the manual, please contact us.
• To maintain long-term, stable performance of the product, observe the
operation instructions in this manual.
1.3 History
1
st
Edition: August, 2007
•
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