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1-5 Applicable Standards
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OMNUC G5-SERIES AC SERVOMOTOR AND SERVO DRIVE USER'S MANUAL
Features and System Configuration
SEMI F47
Some Servo Drives conform to the SEMI F47 standard for momentary power interruptions
(voltage sag immunity) for no-load or light-load operation.
This standard applies to semiconductor manufacturing equipment.
Note 1. It does not apply to Servo Drivers with single-phase 100-V specifications or with
24-VDC specifications for the control power input.
Note 2. Always perform evaluation testing for SEMI F47 compliance in the actual system.
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