Keithley 2182 Service Manual

Keithley Instruments, Inc.
Cleveland, Ohio 44139
DRN.
CKD.
APP.
DATE
DATE
DATE
PART NUMBER
LTR REVISIONS APP. DATE
FORM 28777A-SBG
BRUNING 40-21 62198-SBG
SPECIFICATIONS
SPEC-2182A
A Released 29844 SZ 6/11/04
HW 6/11/04
SK 6/11/04
RKN 6/08/04
Rev A
Page 1 of 3
2182A Nanovoltmeter Specifications
VOLTS SPECIFICATIONS (20% OVER RANGE)
CONDITIONS: 1PLC with 10 reading digital filter or 5PLC with 2 reading digital filter.
ACCURACY: ±(ppm of reading + ppm of range)
(ppm = parts per million) (e.g., 10ppm = 0.001%)
CHANNEL 1
RANGE RESOLUTION INPUT RESISTANCE
24 Hour
1
T
CAL
±1°C
90 Day
T
CAL
±5°C
1 Year
T
CAL
±5°C
2 Year
T
CAL
±5°C
TEMPERATURE
COEFFICIENT
0°-18°C & 28°-50°C
10.000000 mV
2,3,4
1 nV
>10 GΩ
20 + 4 40 + 4 50 + 4 60 + 4 (1 + 0.5)/°C
100.00000 mV 10 nV
>10 GΩ
10 + 3 25 + 3 30 + 4 40 + 5 (1 + 0.2)/°C
1.0000000 V 100 nV
>10 GΩ
7 + 2 18 + 2 25 + 2 32 + 3 (1 + 0.1)/°C
10.000000 V 1 µV
>10 GΩ
2 + 1
5
18 + 2 25 + 2 32 + 3 (1 + 0.1)/°C
100.00000 V
4
10 µV
10 MΩ±1%
10 + 3 25 + 3 35 + 4 52 + 5 (1 + 0.5)/°C
CHANNEL 2
6,10
100.00000 mV 10 nV
>10 GΩ
10 + 6 25 + 6 30 + 7 40 + 7 (1 + 1)/°C
1.0000000 V 100 nV
>10 GΩ
7 + 2 18 + 2 25 + 2 32 + 3 (1 + 0.5)/°C
10.000000 V 1 µV
>10 GΩ
2 + 1
5
18 + 2 25 + 2 32 + 3 (1 + 0.5)/°C
CHANNEL 1/CHANNEL 2 RATIO: Ratio accuracy =
±channel 2 reading (accuracy channel 1 range) + channel 1 reading (accuracy channel 2 range)
(channel 2 reading)
2
DELTA (hardware-triggered coordination with 24XX series or 622X series current sources for low noise R measurement): accuracy = accuracy of selected
Channel 1 range plus accuracy of I source range.
DELTA measurement noise with 6220 or 6221 : Typical 3nVRMS/
√Hz (10mV range)
21
. 1 Hz achieved with 1PLC, delay = 1ms, RPT filter = 23 (20 if 50Hz)
PULSE-MODE (with 6221): line synchronized voltage measurements within current pulses from 50us to 12ms, pulse repetition rate up to 12 Hz
Pulse measurement noise:
(typical RMS noise, R
DUT
<10 ohms) (0.009ppm of range
*
)/meas_time/√pulse_avg_count + 3nV/√(2 · meas_time · pulse_avg_count) for 10mV range
**
*
0.0028ppm for the 100mV range, 0.0016ppm for ranges 1V and above
**
8nV/√Hz for ranges above 10mV meas_time(sec) = pulsewidth – pulse_meas_delay in 33us incr.
DC NOISE PERFORMANCE
7
(DC NOISE EXPRESSED IN VOLTS PEAK-TO-PEAK)
Response time = time required for reading to be settled within noise levels from a stepped input, 60Hz operation.
RANGE
CHANNEL 1
RESPONSE TIME NPLC, FILTER 10mV 100mV 1V 10V 100V NMRR
8
CMRR
9
25.0 s 5, 75 6 nV 20 nV 75 nV 750 nV 75 µV 110 dB 140 dB
4.0 s 5, 10 15 nV 50 nV 150 nV 1.5 µV 75 µV 100 dB 140 dB
1.0 s 1, 18 25 nV 175 nV 600 nV 2.5 µV 100 µV 95 dB 140 dB
667 ms 1, 10 or 5, 2 35 nV 250 nV 650 nV 3.3 µV 150 µV 90 dB 140 dB
60 ms 1, Off 70 nV 300 nV 700 nV 6.6 µV 300 µV 60 dB 140 dB
CHANNEL 2
6,10
25.0 s 5, 75 - 150 nV 200 nV 750 nV - 110 dB 140 dB
4.0 s 5, 10 - 150 nV 200 nV 1.5 µV - 100 dB 140 dB
1.0 s 1, 10 or 5, 2 - 175 nV 400 nV 2.5 µV - 90 dB 140 dB
85 ms 1, Off - 425 nV 1 µV 9.5 µV - 60 dB 140 dB
VOLTAGE NOISE VS. SOURCE RESISTANCE
11
(DC NOISE EXPRESSED IN VOLTS PEAK-
TO-PEAK)
SOURCE
RESISTANCE NOISE ANALOG FILTER DIGITAL FILTER
0 Ω
6 nV Off 100
100 Ω
8 nV Off 100
1 kΩ
15 nV Off 100
10 kΩ
35 nV Off 100
100 kΩ
100 nV On 100
1 MΩ
350 nV On 100

Keithley 2182 Specifications

General

Brand	Keithley
Model	2182
Category	Measuring Instruments
Language	English