2. Installation and Setup
2.4.8 Checking the cross-travel stage feed error
If the stage moves normally in 2.4.7, checking of feed error over a 5 mm travel may be
sufficient. In this checking, many factors must be taken into consideration, including
environmental conditions and alignment error.
Any feed error should be less than 0.01 mm per 5mm of travel.
1. Mount a projection lens.
2. Place a standard scale or other reference of known size on the cross-travel stage
to project its image on the screen.
3. Feed the stage and determine the feed error by measuring the standard scale
along the X-axis (left-right) and Y-axis (front-rear).
4. Check the feed error in the opposite travel directions (i.e. returning directions) for
both X- and Y-axes.
• Contact Mitutoyo if the error is excessive.
2.4.9 Checking the resolution (in contour illumination mode)
1. Mount a projection lens.
2. Place a workpiece on the cross-travel stage and project its image on the screen.
Ensure that the image is clear over the entire screen without any obscured regions.
• Refer to 4.4.4 if an obscure region is present.
No.99MBA043A 2 - 23
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