Maintenance 9. Bellows
LS20 Rev.4 129
9. Bellows
The bellows are provided in a unit of two pieces. The shape varies between the upper
and lower bellows.
A large amount of dust is emitted when replacing the bellows.
Take the Manipulator to an outer room such as the room in front of the clean room’s
entrance, or take the necessary countermeasures to prevent dust emission before removing
the bellows.
Maintenance parts
Bellows 1
1499591
Tools
Cross-point screwdriver 1 For clamp band removal
cables and tubes from the end effector.
Turn ON the controller. Stop motor
excitation. (MOTOR OFF)
oosen the two clamp bands on the bellows.
out the bellows and clamp bands from the shaft.