5 - 1
5 MAINTENANCE
Periodically perform inspection and maintenance of the following items to keep the system in
good working condition to extend the lifetime of the instrument.
1. After reading this instruction manual carefully, perform the maintenance according to the
procedures described in this manual.
2. Do not disassemble, assemble or repair items which are not described in this instruction
manual.
3. Contact the nearest service office if the Turbo Molecular Pump (TMP) or Diaphragm
Pump (DFP) maintenance message appears.
The inspection and maintenance list is shown in Table 5.
Table 5 Inspection and Maintenance List
Item Task Interval Notes
Filament
Filament
replacement
When the filament is broken See Section 5.1.
Wehnelt Cleaning
When the filament is
replacements
See Section 5.1 9. .
Anode Cleaning
Once every 5 to 6 filament
replacements
See Section 5.1 9. .
Condenser lens
aperture
Condenser lens
aperture
replacement
Every 6 months (or when
image quality deteriorates)
See Section 5.3.
Objective aperture
Objective
aperture
replacement
Every 6 months (or when
image quality worsens)
See Section 5.4.
TMP
(Turbo molecular
pump)
TMP
replacement
DFP (Diaphragm
pump)
Diaphragm
replacement
3 to 5 years
The work is
performed by a
service engineer.
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