6 - 1
6 REPLACEMENT PARTS
6.1 Consumables
Obtain the following consumables as needed to operate the system. (See Table 6.1.)
Table 6.1 Consumables
Part No. Part Name Usage Notes
G370009
Electrically conductive
coating
To prevent charge on
nonconductive specimen
30 g pack
50E-6159 Carbon seal Fixing specimen 20 sheet pack
52E-6656 Metal abrasive For vacuum parts cleaning 10 g pack
G743002 Bamboo sticks For vacuum parts cleaning 10 sticks per package
S370057 Gauze For vacuum parts cleaning －
S269003 Aluminum foil For vacuum parts cleaning －
50E-1991 Vacuum grease For vacuum sealing －
52E-1602 Objective aperture plate 0.15 mm diameter 1 piece
535-1289
Mono-porosity mesh
(made of MO)
For focusing aperture 20 sheet pack
51E-0240 Cartridge Filament Filament 10 piece pack
－ Ethyl alcohol For vacuum parts cleaning －
52E-6657 Fitting gloves For vacuum parts handling －
55E-1122 Objective lens unit For objective aperture －
55E-1123 Liner Tube For focusing aperture －
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