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6.3 Spare Parts
The spare parts shown below must be obtained when the system is operated for a long time.
The number of spare parts you need to stock differs depending on your usage. (See Table
6.3.)
Table 6.3 Spare Parts
Part No. Name Remarks
Quantity
Used
J821153 Fuse For maintenance (0.3 A) 2
J821154 Fuse For maintenance (0.5 A) 2
J821156 Fuse For maintenance (1.6 A) 2
J821157 Fuse For maintenance (2 A) 2
J821158 Fuse For maintenance (3.2 A) 2
J821159 Fuse For maintenance (5 A) 2
J821591 Alarm Fuse For maintenance (2 A) 2
J821594 Alarm Fuse For maintenance (5 A) 2
J821055 Fuse For maintenance (6.3 A) 2
55E-1392 Specimen stage ∅70 mm －
55E-1682 Specimen stage ∅30 mm －
L456819 O-ring For electron gun 1
L456111 O-ring For inner pipe 1
L456850 O-ring For specimen chamber port (front) 1
L456824 O-ring For specimen chamber port (side) 1
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