Hitachi TM3000 User Manual

6 - 2
6.2 Limited Life Parts
The parts which are regarded as limited life parts (See Table 6.2) must be replaced in the
specified interval. If the system is continuously used without properly replacing the limited life
parts, it may not only damage the system but cause safety problems. Contact the nearest
service office to schedule the replacements.
Table 6.2 Limited Life Parts List
Part No. Part Name Usage
Replacement
Interval
55E-1275 P Turbo molecular pump Turbo molecular pump 5 years
52E-6688 DFP maintenance kit For DFP maintenance 5 years
55E-1642 SR exhaust tube N assy
Exhaust tube between turbo
molecular pump and diaphragm
pump
5 years
55E-1692 Exhaust tube
Exhaust tube and sealing
component between turbo
molecular pump and specimen
chamber
5 years
K433004 Pirani gauge Vacuum level measurement
detector
3 years
51E-1492 Element Leak valve (V1) filter 5 years
55E-1317 Element (5) Slow leak valve (V2) filter 5 years
55E-1171 Spring Specimen stage (For lock nut) 4 years
52E-6980 Diaphragm pump Evacuation System 5 years
55E-1118 Deflection coil Column 5 years
55E-2810 ACWHND00SP assy － 5 years
55E-2811 CONTROL0SP assy － 5 years
55E-2812 COLHVC00SP assy － 5 years
55E-2803 5CHAMP00SP assy － 5 years
55E-2814 IO-DRV00SP assy － 5 years
55E-2805 LED00SP assy － 5 years
55E-2806 ISAL00SP assy － 5 years
55E-2807 TMPMCONT00SP assy － 5 years
55E-2808 REGOUT00SP assy － 5 years
55E-2835 HVT SP assy － 5 years
55E-2602 NF cord assy － 5 years

Hitachi TM3000 Specifications

General

Brand	Hitachi
Model	TM3000
Category	Microscope
Language	English