1.3 Specifications
Table 1.3 Specifications
Item Product Specifications
1 Accelerating voltage 5 kV, 15 kV
2
Magnification 15 to 30000x (image display magnification: number of
steps: 40 (
※
1) )
(digital zoom 2x, 4x), max. observation range: 3.5 mm on
an edge
The minimum magnification depends on the accelerating
voltage, D (
※
2), and the screen size.
3 Maximum specimen size 70 mm (diameter)
4
Maximum specimen
thickness
50 mm
5 Specimen stage X
：
35 mm, Y
：
35 mm (X, Y only)
6 Electron gun Pre-centered cartridge filament
7 Stigma correction coil Provided
8 Image shift ±50 μm (15 kV mode: D=4.5 mm)
9
Detector High-sensitivity semiconductor backscattered electron
detector
10 Control CPU method Notebook PC + dedicated microcomputer control
11 Monitor (recommended) LCD attached to the notebook PC (15.4-inch)
12 Image data recording Hard disk mounted on PC, and other recording media
13 Recording pixels 1280×960 pixels (max.) /640×480 pixels
14 Data display Micron marker, file No., date, comments
15 Automated function Auto luminosity control, auto focusing adjustment
16
Auxiliary operation
function
Raster rotation
Magnification preset (2 steps)
17
Vacuum pump Compact turbo molecular pump: 30 l/s
Diaphragm pump: 1 m
3
/h
18 Vacuum detector Pirani gauge
19 Frequency 50/60 Hz
20
Main unit power supply AC 100 to 240 V (Min. 90 V, Max. 250 V), 500 VA
Built-in earth leakage breaker (5 A/(15 mA)): 3P outlet
connection
21
Dimensions/weight Main unit: 330×606×550 63 kg (manual stage)
330×630×550 66 kg (motor drive stage)
Diaphragm pump: 145×256×217 4.5 kg
(※1) Magnification steps
×15 18 20 25 30 40 50 60 80 100 120 150 180 200 250 300 400 500 600 800 1000
1200 1500 1800 2000 2500 3000 4000 5000 6000 7000 8000 9000 10000 12000
15000 18000 20000 25000 30000
(※2) [D] denotes the distance between the specimen surface and the detector.
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