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3. Start the beam axis adjustment mode.
Beam axis adjustment is a three-step process, involving a gradual adjustment of the beam
irradiation position to the center of the lens. From the [Maintenance] menu, select [Beam axis
adjustment] to bring up the Beam Axis Adjustment window.
Figure 5.2-3 Starting the Beam Axis Adjustment Mode
NOTE
: Beam axis adjustment can be performed only when electron beam irradiation is on
(with HV-ON). During the execution of beam axis adjustment, do not operate the
specimen stage for the main unit, as operating the specimen stage can hamper
the beam axis adjustment process.
Click the [OK] button as the following confirmation message is displayed. A Beam Axis
Adjustment window appears.
Figure 5.2-4 Image Verification Specimen Loading Confirmation Window (1)
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