Hitachi TM3000 User Manual

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Figure 5.2-7 Beam Axis Adjustment STEP 1, an Example
4a. First, loosen the four axis adjustment knobs, A, B, C and D, by approximately one turn.
Figure 5.2-8 Operating the Electron Gun Axis Adjustment Knobs (1)
Figure 5.2-9 Operating the Electron Gun Axis Adjustment Knobs (2)
4b. In the next step, turn one of the knobs (for example, Screw A in Figure 5.2-8) in a
fastening direction. When it becomes tight, loosen the knob in the opposite direction (in
Figure 5.2-8, Screw C), and then turn Screw A further in the tightening direction. During this
operation, turn the knob while paying attention to the image. When an image appears, adjust
the knobs in the direction of a brightening image.

Hitachi TM3000 Specifications

General

Accelerating Voltage	5 kV, 15 kV
Resolution	30 nm
Type	Tabletop Scanning Electron Microscope
Sample Size	70 mm diameter
Vacuum System	Turbo Molecular Pump
Image Capture	Digital image capture
Filament Type	Tungsten filament
Detector	Secondary Electron Detector (SED), Backscattered Electron Detector (BSED)