Edwards iXM Series User Manual

Copyright noce
©Edw
ards Limited 2020. All rights reserved.
Associated publicaons
Publicaon tle Publicaon number
Vacuum pump and vacuum system safety P40040100
Semiconductor pumping applicaon guide P41100090
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Han® is a registered trademark of Harng Electric GmbH.
EtherCon® is a registered trademark of Neutrik® AG.
Fomblin® is a registered trademark of Solvay Solexis SpA.
EtherCAT® is a registered trademark of Beckho Automaon GmbH
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

Edwards iXM Series Specifications

General

Brand	Edwards
Model	iXM Series
Category	Water Pump
Language	English